IMM-100 Thin Film Deposition Monitor

IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.

With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.

FEATURES

INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
Maximize yield with the best QCM thickness measurement possible
Single channel rate and thickness monitor without unnecessary added features to minimize cost
±0.0035 Hz over 100 ms sample
EtherCAT communications for seamless integration
Compact size to minimize integration costs by saving tool real estate
Expert application support, able to discuss unique application needs and give greater support than the competition
RoHS compliant

TYPICAL APPLICATIONS