Guardian Controller for two sensors (standard or gas compensating)
SQM160 Inficon Thin Film Thickness Monitor
IMM-100 Thin Film Deposition Monitor
MULTIPIN CONNECTOR
SQC310 Thin Film Deposition Controller
SQC310C Thin Film Co-Deposition Controller
Crystal 12 Sensor
200 W solid-state microwave generator sub-system at 2450 MHz
200 W solid-state microwave generator at 2450 MHz
15.2 m (50 ft.) BNC Cable, male/male