Inficon

SemiQCM Sensors

The SemiQCM™ sensor is one component of a system for precursor monitoring with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).

Semi Process Monitoring can be used in semiconductor applications for end point detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.

The failure to deliver precursor to a wafer can be detected in as little as one wafer.